spa slot
spa slot

spa slot

$333.00 $999.00
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The Trias SPA 200 system of Tokyo Electron Limited (TEL), which adopts a slot-plane-antenna (SPA) technique (see Fig. 1) to generate a high-density ( ∼ 1 × 10 12 cm − 3 ) plasma under low T e ... apik bet88 slot

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